Oh oh, I guess I should have elaborated a bit. My book dates through 1983, the last number I have for a M94 is 5,103,249.
If I'm reading your numbers correctly they are 13,xxx,xxx 16,xxx,xxx and 22,xxx,xxx. Is that right? If you take away one x then the 13 would have been built in '42 or '43, the 16 would be in '49 or '50, and the 22 '56-'58. Does any of this make any sence? If I had all but the last two or three numbers I could tell you the specfic years.
Hope this helps.